TY  - BOOK
AU  - Taniguchi, Norio
TI  - Nanotechnology: integrated processing systems for ultra-precision and ultra-fine products
SN  - 9780200000000
U1  - 620.5 N21 
PY  - 2008///
CY  - New York
PB  - Oxford University Press
KW  - Nanotechnology
ER  -