| 000 | 00433nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 161001s2008 xx 000 0 und d | ||
| 020 | _a9780200000000 | ||
| 082 | _a620.5 N21 | ||
| 100 | _aTaniguchi, Norio | ||
| 245 | _aNanotechnology: integrated processing systems for ultra-precision and ultra-fine products | ||
| 260 |
_aNew York _bOxford University Press _c2008 |
||
| 300 | _a406p. | ||
| 650 | _aNanotechnology | ||
| 942 |
_2ddc _cC |
||
| 999 |
_c3270 _d3270 |
||